ZONDA Hexapod
Payload (vertical / Horizontal )
400 kg / 140 kg
Linear travel range
± 50 mm / ± 200 mm
Angular travel range
± 20 °
Linear/angular resolution
0.1 µm / 1.5 µrad (0.5µrad)
Height middle position
360 mm / 640mm
Vacuum / Cryo / Cleanroom
HV (10-6) / No / ISO 5
HIGH ACCURACY AND HEAVY PAYLOAD
ZONDA hexapod is a new high-performance 6DOF system meeting applications requiring both high precision, stability, accuracy, heavy load and large travels.
Designed to position up to 400 kg payload with a resolution of 0.1 µm only, ZONDA hexapod offers great travel with 400 mm in XY, 300 mm in Z, and 40 ° in the three rotations Rx, Ry and Rz.
ZONDA hexapod has unmatched accuracy and thermal stability characteristics thanks to the integrating Invar components with a very low CTE (Coefficient of Thermal Expansion), linear absolute encoders integrated as a standard in the actuators and the design of particularly rigid joints.
ZONDA hexapod can be used in any orientation: vertical, horizontal, upside down…
Optionally, ZONDA hexapod can be high vacuum (10-6 mbar) or cleanroom compatible.
Description
HIGH ACCURACY AND HEAVY PAYLOAD
ZONDA hexapod is a new high-performance 6DOF system meeting applications requiring both high precision, stability, accuracy, heavy load and large travels.
Designed to position up to 400 kg payload with a resolution of 0.1 µm only, ZONDA hexapod offers great travel with 400 mm in XY, 300 mm in Z, and 40 ° in the three rotations Rx, Ry and Rz.
ZONDA hexapod has unmatched accuracy and thermal stability characteristics thanks to the integrating Invar components with a very low CTE (Coefficient of Thermal Expansion), linear absolute encoders integrated as a standard in the actuators and the design of particularly rigid joints.
ZONDA hexapod can be used in any orientation: vertical, horizontal, upside down…
Optionally, ZONDA hexapod can be high vacuum (10-6 mbar) or cleanroom compatible.
SPECIFICATIONS
Travel range : ± 200 mm / ± 20 °
Resolution : 0.1 µm
Repeatability : ± 0.25 µm / ± 1 µrad
Payload : 400 kg
APPLICATIONS
- Optics
- Research & Engineering
- Space
- Synchrotron