ZONDA Hexapod

ZONDA Hexapod

Payload (vertical / Horizontal )

400 kg / 140 kg

Linear travel range

± 50 mm / ± 200 mm

Angular travel range

± 20 °

Linear/angular resolution

0.1 µm / 1.5 µrad (0.5µrad)

Height middle position

360 mm / 640mm

Vacuum / Cryo / Cleanroom

HV (10-6) / No / ISO 5

Category:

HIGH ACCURACY AND HEAVY PAYLOAD

ZONDA hexapod is a new high-performance 6DOF system meeting applications requiring both high precision, stability, accuracy, heavy load and large travels.

Designed to position up to 400 kg payload with a resolution of 0.1 µm only, ZONDA hexapod offers great travel with 400 mm in XY, 300 mm in Z, and 40 ° in the three rotations Rx, Ry and Rz.

ZONDA hexapod has unmatched accuracy and thermal stability characteristics thanks to the integrating Invar components with a very low CTE (Coefficient of Thermal Expansion), linear absolute encoders integrated as a standard in the actuators and the design of particularly rigid joints.

ZONDA hexapod can be used in any orientation: vertical, horizontal, upside down…

Optionally, ZONDA hexapod can be high vacuum (10-6 mbar) or cleanroom compatible.

Description

HIGH ACCURACY AND HEAVY PAYLOAD

ZONDA hexapod is a new high-performance 6DOF system meeting applications requiring both high precision, stability, accuracy, heavy load and large travels.

Designed to position up to 400 kg payload with a resolution of 0.1 µm only, ZONDA hexapod offers great travel with 400 mm in XY, 300 mm in Z, and 40 ° in the three rotations Rx, Ry and Rz.

ZONDA hexapod has unmatched accuracy and thermal stability characteristics thanks to the integrating Invar components with a very low CTE (Coefficient of Thermal Expansion), linear absolute encoders integrated as a standard in the actuators and the design of particularly rigid joints.

ZONDA hexapod can be used in any orientation: vertical, horizontal, upside down…

Optionally, ZONDA hexapod can be high vacuum (10-6 mbar) or cleanroom compatible.

SPECIFICATIONS

Travel range : ± 200 mm / ± 20 °
Resolution : 0.1 µm
Repeatability : ± 0.25 µm / ± 1 µrad
Payload : 400 kg

APPLICATIONS

  • Optics
  • Research & Engineering
  • Space
  • Synchrotron