Small Hexapod for Nanometer Motions - NANOPOS

NANOPOS Hexapod

Payload

500 g

Linear travel range

± 5 mm

Angular travel range

± 10 °

Linear/angular resolution

10 nm / 1 µrad

Height middle position

68 mm

Vacuum / Cryo / Cleanroom

UHV / 70 K / ISO 5

Category: Hexapods

PIEZO HEXAPOD WITH NANOMETER RESOLUTION

NanoPos is a miniature hexapod of 68 mm height for positioning and adjustment of precision components in 6 degrees of freedom with a 10 nm resolution.

NanoPos hexapod comes with outstanding characteristics for its small size thanks to the integration of extremely compact piezo stages, high-quality joints, and low friction mechanical parts.

Its closed cloop control with linear optical encoders enables it to reach the highest precision performances.

Options:

High vacuum
Ultra high vacuum
Cryo (down to 70K)
Cleanroom ISO5

SPECIFICATIONS

Travel range: ± 5 mm / ± 10 °
Resolution: 10 nm / 1 µrad
Repeatability: ± 38 nm / ± 1 µrad
Payload: 500 g

CONTROLLER

Controlling a parallel kinematics mechanism such as a hexapod requires fast and numerous calculations to transform the position instructions into motor current set points while permanently securing the motions.,For this all our hexapods come with a high performance control rack interacting with either our Graphical User Interface (GUI) or optionally directly with your software environment through an Application Programming Interface (API).

A COMPLETE AND FLEXIBLE SOLUTION

Our racks are made with:

a powerful multi-axis Delta Tau industrial controller
drivers sized to meet the needs of each application
input-output modules allowing various interactions with the hexapod environment.

Our robust and flexible controller solutions can be adapted to different types of motors (DC, brushless, stepper, piezo) coupled to various encoders technologies (absolute, incremental, linear, rotary).

Optics
Research & Engineering
Space
Synchrotron

Data Sheet and Brochures

NANOPOS Data Sheet

Capella Controller Data Sheet

Positioning Hexapods Catalog

HELP FOR HEXAPOD CONTROL

Thanks to an ergonomic Human Machine Interface (HMI), SYM_Positioning hexapod positioning and control software offers simple commands from the home screen, but also generations of movements using specific files. In addition, the center of rotation can be easily changed in the software.

SYM_POSITIONING ALLOWS:

■ Safe movement control
■ Position display in real time
■ Generate position sequences
■ The configuration of the center of rotation
■ Configure repositories (coordinate systems)
■ Configuration of limits (position, speed …)
■ API (Application Programming Interface)
■ To be interfaced in C, LabVIEW, EPICS, SPEC, TANGO, Python, Matlab …

CUSTOMIZATION

Symétrie has the knowledge and solid experience in software development, which means that we can tailor our software to your specific needs.

HEXASYM SIMULATOR

HOW TO CHOOSE YOUR HEXAPOD?

Thanks to this free simulation software, it will be very easy for you to check the possible travels and load capacities of each hexapod in our range. HexaSym will allow you to select the most suitable product for your application and to test a variety of possible configurations with it.

TESTING SEVERAL PARAMETERS

With HexaSym simulator, you can test cumulative travel ranges on several axes simultaneously, including the “worst cases” of your applications. It is also possible to change the center of rotation, to define different reference frames, to vary the orientation of the hexapod (vertical, horizontal, other) and the payload.
HexaSym also includes a 3D visualization that will enable you to see how the hexapod moves according to the commanded positions, as well as sliders allowing you to control movements more immediately.

AND FOR SPECIFIC HEXAPODS

It will also be possible to use HexaSym for our specific hexapods, for which we will provide you with a configuration file compatible with the simulator.

Click here for more information and download the software

Description

Description

PIEZO HEXAPOD WITH NANOMETER RESOLUTION

NanoPos is a small hexapod for nanometer motions of 68 mm height for positioning and adjustment of precision components in 6 degrees of freedom with a 10 nm resolution.

NanoPos small hexapod for nanometer motions comes with outstanding characteristics for its small size thanks to the integration of extremely compact piezo stages, high-quality joints, and low friction mechanical parts.

Its closed cloop control with linear optical encoders enables it to reach the highest precision performances.

SPECIFICATIONS

Travel range: ± 5 mm / ± 10 °
Resolution: 10 nm / 1 µrad
Repeatability: ± 38 nm / ± 1 µrad
Payload: 500 g

Visit the manufacturer’s website: https://symetrie.fr/en/