NANOPOS Hexapod
Payload
500 g
Linear travel range
± 5 mm
Angular travel range
± 10 °
Linear/angular resolution
10 nm / 1 µrad
Height middle position
68 mm
Vacuum / Cryo / Cleanroom
UHV / 70 K / ISO 5
PIEZO HEXAPOD WITH NANOMETER RESOLUTION
NanoPos is a miniature hexapod of 68 mm height for positioning and adjustment of precision components in 6 degrees of freedom with a 10 nm resolution.
NanoPos hexapod comes with outstanding characteristics for its small size thanks to the integration of extremely compact piezo stages, high-quality joints, and low friction mechanical parts.
Its closed cloop control with linear optical encoders enables it to reach the highest precision performances.
Options:
- High vacuum
- Ultra high vacuum
- Cryo (down to 70K)
- Cleanroom ISO5
Description
PIEZO HEXAPOD WITH NANOMETER RESOLUTION
NanoPos is a miniature hexapod of 68 mm height for positioning and adjustment of precision components in 6 degrees of freedom with a 10 nm resolution.
NanoPos hexapod comes with outstanding characteristics for its small size thanks to the integration of extremely compact piezo stages, high-quality joints, and low friction mechanical parts.
Its closed cloop control with linear optical encoders enables it to reach the highest precision performances.
SPECIFICATIONS
Travel range: ± 5 mm / ± 10 °
Resolution: 10 nm / 1 µrad
Repeatability: ± 38 nm / ± 1 µrad
Payload: 500 g