NANOPOS Hexapod

NANOPOS Hexapod

Payload

500 g

Linear travel range

± 5 mm

Angular travel range

± 10 °

Linear/angular resolution

10 nm / 1 µrad

Height middle position

68 mm

Vacuum / Cryo / Cleanroom

UHV / 70 K / ISO 5

Category:

PIEZO HEXAPOD WITH NANOMETER RESOLUTION

NanoPos is a miniature hexapod of 68 mm height for positioning and adjustment of precision components in 6 degrees of freedom with a 10 nm resolution.

NanoPos hexapod comes with outstanding characteristics for its small size thanks to the integration of extremely compact piezo stages, high-quality joints, and low friction mechanical parts.

Its closed cloop control with linear optical encoders enables it to reach the highest precision performances.

Options:

  • High vacuum
  • Ultra high vacuum
  • Cryo (down to 70K)
  • Cleanroom ISO5

 

Description

PIEZO HEXAPOD WITH NANOMETER RESOLUTION

NanoPos is a miniature hexapod of 68 mm height for positioning and adjustment of precision components in 6 degrees of freedom with a 10 nm resolution.

NanoPos hexapod comes with outstanding characteristics for its small size thanks to the integration of extremely compact piezo stages, high-quality joints, and low friction mechanical parts.

Its closed cloop control with linear optical encoders enables it to reach the highest precision performances.

SPECIFICATIONS

Travel range: ± 5 mm / ± 10 °
Resolution: 10 nm / 1 µrad
Repeatability: ± 38 nm / ± 1 µrad
Payload: 500 g