BORA Hexapod
Payload (vertical / Horizontal )
10kg vertical / 5kg horizontal
Linear travel range
± 20 mm
Angular travel range
± 15 °
Linear/angular resolution
0.1 µm / 2 µrad
Height middle position
145 mm
Vacuum / Cryo / Cleanroom
HV (10-6) / -40 C / ISO 5
MINIATURE HEXAPOD FOR HIGH ACCURACY POSITIONING
BORA hexapod is a compact 6DOF parallel kinematics system for the positioning and adjustment of precision elements with a resolution of 0.1 µm.
BORA hexapod meets the most demanding criteria of the optics and nanotechnologies in terms of resolution, accuracy, stability and size.
Its dimensions allows an integration in a small environment, for instance at the tip of a goniometer for an application on synchrotron beamline, or on an optical ground support equipment to align and calibrate space optics.
BORA hexapod can be used in any orientation: vertical, horizontal, upside down…
OPTIONS
- High vacuum compatibility down to 10-6 mbar
- Clean room ISO5 (class 100)
Description
MINIATURE HEXAPOD FOR HIGH ACCURACY POSITIONING
BORA hexapod is a compact 6DOF parallel kinematics system for the positioning and adjustment of precision elements with a resolution of 0.1 µm.
BORA hexapod meets the most demanding criteria of the optics and nanotechnologies in terms of resolution, accuracy, stability and size.
Its dimensions allows an integration in a small environment, for instance at the tip of a goniometer for an application on synchrotron beamline, or on an optical ground support equipment to align and calibrate space optics.
BORA hexapod can be used in any orientation: vertical, horizontal, upside down…
SPECIFICATIONS
Travel range: ± 20 mm / ± 15 °
Resolution: 0.1 µm / 2 µrad
Repeatability: ± 0.4 µm / ± 3.2 µrad
Payload: 10 kg vertical / 5 kg horizontal
OPTIONS
► High vacuum compatibility down to 10-6 mbar
► Clean room ISO5 (class 100)